Test system for wide bandgap semiconductors: Page 2 of 3

October 12, 2020 //By Nick Flaherty
The Keithley S530 Series Parametric Test System with KTE 7 software enables semiconductor fabs to add parametric test capacity for SiC and GaN devices
The Keithley S530 Series Parametric Test System with KTE 7 software enables semiconductor fabs to add parametric test capacity for SiC and GaN devices
and S400 systems, preserving full data correlation along with throughput improvements up to 25 percent faster than the S600.

The optional testhead for the S530-HV eliminates the operator time needed to change the instrumentation, probe card, and cabling test setup when moving from low voltage (<200V) to high voltage (>200V) wafer-level tests. The testhead enables probe card compatibility with multiple models from multiple vendors for faster probe card changing and to-the-pin calibration per ISO-17025, while maintaining backward compatibility. This minimizes migration costs and protects customer investment, while supporting new requirements such as automotive standard IATF-16949. 

The S530-HV enables testing up to 1100V on any pin to boost throughput by 50 percent or more over competitive systems in power and WBG applications. Operators can connect any test resource to any test pin in any sequence to quickly and easily support production requirements without reconfiguring or re-tooling signal paths.

The KTE software compatibility greatly simplifies and speeds up the migration path from legacy systems such as the S600, achieving full correlation with up to 25 percent faster throughput.

There is built-in transient over-voltage / over-current protection prevents accidental damage to probe cards, needles, and instrumentation - which is especially critical in high speed WBG applications.

During system calibration, the new 5880-SRU System Reference Unit automatically switches all DC and AC reference standards, thus eliminating the need to manually connect, disconnect, and reconnect. This fully automated process greatly reduces system downtime and resulting support costs when performing calibration, resulting in a lower COO profile.

S530 Series Parametric Test System is now available worldwide, with pricing provided upon request.

tek.com/keithley-semiconductor-parametric-test-systems

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